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Innovator Series Dual-Channel MFC Liquid Delivery Module 

icon_liquiddelivery.jpg dual-channel-mfc-liquid-del.jpg   View Brochure (582KB PDF)
Standard Features

+Separate inlets, liquid mass flow controllers, and outlets of two distinct liquids
+All-digital control eliminates analog calibration requirements and inaccuracies
+Ethernet Interface for simple configuration and expansion!
+The output from multiple Liquid Delivery Modules may be combined to provide dynamically controlled gas flow rates and compositions, including Stoichiometric control
+System-wide control of all FiderisTest System components using FCPower Software, Labview, or other programming language
+Integrated hardwired Run/Standby signal
+Power Over Ethernet (PoE) for redundant power

+Front panel LED status of Ethernet communications, inlet liquid pressure, liquid enabled, and power
+Pressure regulator on inlet liquid lines to provide the highest degree of accuracy, and check valves for liquid backflow prevention

Specifications
Specifications of the Dual-Channel MFC Liquid Delivery Module
Liquid Control: Mass flow control of two separate liquids
Liquid Inlet Valves: Solenoid valve or pneumatically operated bubble tight valve
Maximum Inlet Liquid Pressure: 125 PSI (8.62 Bar)
Mass Flow Controller Brands: All digitally controlled brands available including Alicat, Bronkhorst, Brooks, or Sierra
Electrical Requirements
Control Voltage: 26-50VDC
Communication: Ethernet (DHCP)
Front Panel Controls and Displays
Unit Status: LCD with backlight, flow setpoint, and actual flow
Communications: Tx, Rx, Ident LEDs
Inlet Pressure Status: LED illuminates above threshold pressure
Enabled/Standby Status: Enabled LED
Supply Pressure Gauge: 1 1/2" (optional)
Back Panel Connections
Power / Run/Standby Molex 39660-1004
Communications: RJ45 (8P8C) Ethernet
Supply Connection: Swagelok bulkhead union or optional quick-connect. 1/4" on 1U modules, 1/4" or 3/8" on 2U modules, 1/2" or 3/4" on 3U modules. VCR on optional UHP (Ultra-High Purity) models
Outlet Connection: Swagelok bulkhead union or optional quick-connect. 1/4" on 1U modules, 1/4" or 3/8" on 2U modules, 1/2" or 3/4" on 3U modules. VCR on optional UHP models
Physical Characteristics
Dimensions: 1U Modules: 1.75", 2U Modules: 3.5", 3U Modules: 5.25"
19" rackmount; 21" deep
System Weight: Dependent on configuration,approximately 15 lbs for 1U
Operating Environment: 40 to 100 degrees Fahrenheit, 85% RH
Cabinet Rating: Indoors
Clearance for Operation: Back: 6", Sides: 0", Top: 0"
Optional UHP Module Materials and Finish: 316L (VAR if a welded component). Surface finish 10 micro-inch Ra

Dual-channel-delivery-back.jpg 

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Tes Sol, Inc. | 1315 SE Grace Ave, Ste 130 | Battle Ground, WA 98604 USA
Phone: (360) 687-1393, Fax: (360) 687-8251

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