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Innovator Series General Gas Delivery Module

 icon_liquiddelivery.jpg icon_gen_gas_delivery_broch.jpg   View Brochure (603KB PDF)
Standard Features

+Mix and Match modules to deliver various flow rates and gases. Liquid delivery modules are also available
+Mass flow control of flow rates up to 2500 SLPM per gas
+All-digital control eliminates analog calibration requirements and inaccuracies
+Ethernet Interface for simple configuration and expansion!
+The output from multiple Gas Delivery Modules may be combined to provide dynamically controlled gas flow rates and compositions, including Stoichiometric control

+System-wide control of all Fideris Test System components using FCPower Software, LabviewTM, or other programming language
+Integrated hardwired Run/Standby signal
+Power Over Ethernet (PoE) for redundant power
+Front panel LED status of Ethernet communications, inlet gas pressure, gas enabled, and power
+Check valves for gas backflow prevention
+Pressure regulator on inlet gas line to provide the highest degree of accuracy

Modules Available 

+Gas Delivery- offers mass flow control of one gas stream
+Dual-Channel Output Gas Delivery- separate inlets, mass flow controllers, and outlets of two distinct gases
+Gas Blending Module- two independent mass flow controlled gas streams are mixed before exiting the module
+Extended Range Module- contains both a high flow and a low flow mass flow controller which allows for a turndown ratio of up to 1000 to 1 in a single module
 
+Gas Delivery with Fixed Purge Rate- provides mass flow control of one gas and a fail-safe purge system with an orifice controlled purge rate
+Gas Delivery with Adjustable Purge Rate- provides mass flow control of one gas and a fail-safe purge system with a needle valve controlled purge rate
+Gas Delivery with Adjustable Purge Rate and Purge Readback- provides mass flow control of one gas and a fail-safe purge system with a needle valve controlled purge rate and purge readback

Specifications
Specifications of the Gas Delivery Module
Gas Control: Mass flow control of gas(es)
Gas Inlet Valves: Solenoid or pneumatically operated bubble tight valve
Maximum Inlet Gas Pressure: 125 PSI (8.62 Bar)
Purge Valve (if purge subsystem included):  Fail-safe, normally open, solenoid valve or pneumatically operated valve
Purge (if purge subsystem included):  Fixed orifice or front panel needle valve. Purge MFM available
Electrical Requirements
Control Voltage: 26-50VDC
Communication: Ethernet (DHCP)
Front Panel Controls and Displays 
Purge Operation Mode Switch: On, Disable, Auto
Unit Status: LCD with backlight, flow setpoint, and actual flow
Communications: Tx, Rx, Ident LEDs
Inlet Pressure Status: LED illuminates above threshold pressure
Enabled / Standby Status: Enabled LED
Supply Pressure Gauge: 1 1/2" (optional)
Back Panel Connections
Power / Run/Standby: Molex 39660-1004
Communications: RJ45 (8P8C) Ethernet
Supply Connection: Swagelok bulkhead union or quick connect.   1/4 on 1U modules, 1/4 or 3/8 on 2U modules, 1/2 or 3/4 on 3U modules. VCR on UHP (Ultra-High Purity) models
Outlet Connection: Swagelok bulkhead union or quick connect.  1/4 on 1U modules, 1/4 or 3/8 on 2U modules, 1/2 or 3/4 on 3U modules. VCR on UHP models
Purge Connection (if purge subsystem included)  Swagelok bulkhead union or quick connect. 1/4" on all modules
Physical Characteristics
Dimensions: 1U Modules: 1.75", 2U Modules: 3.5", 3U Modules: 5.25"
19" rackmount; 21" deep 
System Weight: Dependent on configuration, approximately 15 lbs for 1U 
Operating Environment: 40F to 100F; 85% RH
Cabinet Location: Indoors
Clearance for Operation: Back: 6", Sides: 0", Top: 0"
Optional UHP Module Materials and Finish: 316L (VAR if a welded component). Surface finish 10 micro-inch Ra

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Tes Sol, Inc. | 1315 SE Grace Ave, Ste 130 | Battle Ground, WA 98604 USA
Phone: (360) 687-1393, Fax: (360) 687-8251

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