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Specifications of the Gas Delivery Module
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Gas Control: |
Mass flow control of gas(es) |
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Gas Inlet Valves: |
Solenoid or pneumatically operated bubble tight valve |
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Maximum Inlet Gas Pressure: |
125 PSI (8.62 Bar)
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Purge Valve (if purge subsystem included): |
Fail-safe, normally open, solenoid valve or pneumatically operated valve |
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Purge (if purge subsystem included): |
Fixed orifice or front panel needle valve. Purge MFM available |
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Electrical Requirements
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Control Voltage: |
26-50VDC |
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Communication: |
Ethernet (DHCP) |
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Front Panel Controls and Displays
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Purge Operation Mode Switch: |
On, Disable, Auto |
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Unit Status: |
LCD with backlight, flow setpoint, and actual flow |
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Communications: |
Tx, Rx, Ident LEDs |
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Inlet Pressure Status: |
LED illuminates above threshold pressure |
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Enabled / Standby Status: |
Enabled LED |
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Supply Pressure Gauge: |
1 1/2" (optional) |
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Back Panel Connections
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Power / Run/Standby: |
Molex 39660-1004 |
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Communications: |
RJ45 (8P8C) Ethernet |
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Supply Connection: |
Swagelok bulkhead union or quick connect. 1/4 on 1U modules, 1/4 or 3/8 on 2U modules, 1/2 or 3/4 on 3U modules. VCR on UHP (Ultra-High Purity) models |
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Outlet Connection: |
Swagelok bulkhead union or quick connect. 1/4 on 1U modules, 1/4 or 3/8 on 2U modules, 1/2 or 3/4 on 3U modules. VCR on UHP models |
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Purge Connection (if purge subsystem included) |
Swagelok bulkhead union or quick connect. 1/4" on all modules |
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Physical Characteristics
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Dimensions: |
1U Modules: 1.75", 2U Modules: 3.5", 3U Modules: 5.25" 19" rackmount; 21" deep |
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System Weight: |
Dependent on configuration, approximately 15 lbs for 1U |
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Operating Environment: |
40F to 100F; 85% RH |
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Cabinet Location: |
Indoors |
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Clearance for Operation: |
Back: 6", Sides: 0", Top: 0" |
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Optional UHP Module Materials and Finish: |
316L (VAR if a welded component). Surface finish 10 micro-inch Ra |