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Location: Home / MFC Liquid Delivery Module with Extended Range |
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Innovator Series MFC Liquid Delivery Module with Extended Range
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View Brochure (560KB PDF)
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Standard Features
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+Contains both a high flow and a low flow liquid mass flow controller which allows turndown ratios of up to 1000 to 1 in a single module
+All-digital control eliminates analog calibration requirements and inaccuracies
+Ethernet Interface for simple configuration and expansion!
+The output from multiple Liquid Delivery Modules may be combined to provide dynamically controlled gas flow rates and compositions, including Stoichiometric control
+System-wide control of all FiderisTest System components using FCPower Software, Labview, or other programming language
+Integrated hardwired Run/Standby signal
+Power Over Ethernet (PoE) for redundant power
+Front panel LED status of Ethernet communications, inlet liquid pressure, liquid enabled, and power
+Pressure regulator on inlet liquid line to provide the highest degree of accuracy, and check valve for liquid backflow prevention
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Specifications
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Specifications of the MFC Liquid Delivery Module with Extended Range
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Liquid Control: |
Dual mass flow control (high flow/low flow) of one liquid |
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Liquid Inlet Valves: |
Solenoid valve or pneumatically operated bubble tight valve |
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Maximum Inlet Liquid Pressure: |
125 PSI (8.62 Bar) |
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Mass Flow Controller Brands: |
All digitally controlled brands available including Alicat, Bronkhorst, Brooks, or Sierra |
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Electrical Requirements
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Control Voltage: |
26-50VDC |
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Communication: |
Ethernet (DHCP) |
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Front Panel Controls and Displays
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Unit Status: |
LCD with backlight, flow setpoint, and actual flow |
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Communications: |
Tx, Rx, Ident LEDs |
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Inlet Pressure Status: |
LED illuminates above threshold pressure |
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Enabled/Standby Status: |
Enabled LED |
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Supply Pressure Gauge: |
1 1/2" (optional) |
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Back Panel Connections
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Power / Run/Standby |
Molex 39660-1004 |
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Communications: |
RJ45 (8P8C) Ethernet |
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Supply Connection: |
Swagelok bulkhead union or optional quick-connect. 1/4" on 1U modules, 1/4" or 3/8" on 2U modules, 1/2" or 3/4" on 3U modules. VCR on optional UHP (Ultra-High Purity) models |
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Outlet Connection: |
Swagelok bulkhead union or optional quick-connect. 1/4" on 1U modules, 1/4" or 3/8" on 2U modules, 1/2" or 3/4" on 3U modules. VCR on optional UHP models |
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Physical Characteristics
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Dimensions: |
1U Modules: 1.75", 2U Modules: 3.5", 3U Modules: 5.25"
19" rackmount; 21" deep |
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System Weight: |
Dependent on configuration,approximately 15 lbs for 1U |
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Operating Environment: |
40 to 100 degrees Fahrenheit, 85% RH |
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Cabinet Rating: |
Indoors |
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Clearance for Operation: |
Back: 6", Sides: 0", Top: 0" |
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Optional UHP Module Materials and Finish: |
316L (VAR if a welded component). Surface finish 10 micro-inch Ra |
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| Copyright ©2012 Fideris Brand Test and Automation Equipment |
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Tes Sol, Inc. | 1315 SE Grace Ave, Ste 130 | Battle Ground, WA 98604 USA
Phone: (360) 687-1393, Fax: (360) 687-8251
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