Gas Mixing, Delivery & Purge

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Gas Delivery

MFC gas delivery with customer specified brand of digital MFC and flowrates up to 2500 SLPM per module

Gas Delivery with Fixed Purge Rate

Mass flow controlled gas channel with additional fail-safe, fixed (orifice) flow of purge gas

 

Gas Delivery with Adjustable Purge Rate

Mass flow controlled gas with fail-safe, front panel needle valve flow control of purge gas

Gas Delivery with Adjustable Purge Rate and Purge Readback

Mass flow controlled gas with fail-safe, front-panel needle valve purge flow control and mass flow meter reading of purge flow for failsafe operation.

Gas Delivery with Extended Range

Dual mass flow controllers allow this module to double the normal flow range. Available withtotal flowrate up to 5000 SLPM

Gas Blending

Dual mass flow controllers with two input gases and a single output channel allow this module to output any ratio of the two gases

Dual Channel Output Gas Delivery

Dual mass flow controllers with two input gases and dual output channels allow this module to provide full control of two separate gas streams

Delivery with Gas Select

Mass flow controller based delivery with gas select and customer specified brand of digital MFC and flowrates up to 2500 SLPM per module

Blower Based Temperature Dependent Air Delivery

Blower based temperature dependent air delivery

Blower Based Air Delivery with Mass Flow Controller

Blower based MFC air delivery with customer specified brand of digital MFC and flowrates up to 2500 SLPM per module

Leak Rate Module