1.360.687.1393
Mass flow controller based gas delivery with customer specified brand of digital MFC and flowrates up to 2500 SLPM per module
Mass flow controlled gas channel with additional fail-safe, fixed (orifice) flow of purge gas
Mass flow controlled gas with fail-safe, front panel needle valve flow control of purge gas
Mass flow controlled gas with fail-safe, front-panel needle valve purge flow control and mass flow meter reading of purge flow for failsafe operation.
Dual mass flow controllers allow this module to double the normal flow range. Available withtotal flowrate up to 5000 SLPM
Dual mass flow controllers with two input gasesand a single output channel allow this module to output any ratio of the two gases
Dual mass flow controllers with two input gases and dual output channels allow this module to provide full control of two separate gas streams
Gas Mixing, Delivery & Purge
