Gas Delivery

Gas Delivery Front

Gas Delivery Back

Provides mass flow control of one gas and a fail-safe purge system with orifice controlled purge rate
Flow rates up to 2500 SLPM per gas
All-digital control eliminates analog calibration requirements and inaccuracies
Ethernet Interface for simple configuration and expansion!
The output from multiple Gas Delivery Modules may be combined to provide dynamically controlled gas flow rates and compositions, including Stoichiometric control
System-wide control of all Fideris® Test System Components using FCPower Software, Labview, or other programming language
Integrated hardwired Run/Standby signal
Power Over Ethernet (PoE) for redundant power
Front panel LED status of Ethernet communications, inlet gas pressure, gas enabled, and power
Pressure regulator on inlet gas line to provide the highest degree of accuracy, and check valves for gas backflow prevention

Specifications

Specifications of the Gas Delivery Module

Gas Control:

Mass flow control of gas

Gas Inlet Valves:

Solenoid or pneumatically operated bubble tight valve

Maximum Inlet Gas Pressure:

125 PSI (8.62 Bar)

Mass Flow Controller Brands:

All digitally controlled brands available including Alicat, Bronkhorst, Brooks, MKS, or Sierra

Electrical Requirements

Control Voltage:

26-50VDC

Communication:

Ethernet (DHCP)

Front Panel Controls and Displays

Unit Status:

LCD with backlight, flow setpoint, and actual flow

Communications:

Tx, Rx, Ident LEDs

Inlet Pressure Status:

LED illuminates above threshold pressure for main gas and purge gas

Enabled / Standby Status:

Enabled LED

Supply Pressure Gauge:

1 1/2" (optional)

Back Panel Connections

Power / Run/Standby:

Molex 39660-1004

Data Connections:

Ethernet

Communications:

RJ45 (8P8C) Ethernet

Supply Connection:

Swagelok bulkhead union or optional quick-connect. 1/4" on 1U modules, 1/4" or 3/8" on 2U modules, 1/2" or 3/4" on 3U modules. VCR on optional UHP (Ultra-High Purity) models

Outlet Connection:

Swagelok bulkhead union or optional quick-connect. 1/4" on 1U modules, 1/4" or 3/8" on 2U modules, 1/2" or 3/4" on 3U modules. VCR on optional UHP models

Physical Characteristics

Dimensions:

1U Modules: 1.75", 2U Modules: 3.5", 3U Modules: 5.25"
19" rackmount; 21" deep

System Weight:

Dependent on configuration,approximately 15 lbs for 1U

Operating Environment:

40F to 100F; 85% RH

Cabinet Location:

Indoors

Clearance for Operation:

Back: 6", Sides: 0", Top: 0"

Optional UHP Module Materials and Finish:

316L (VAR if a welded component). Surface finish 10 micro-inch Ra