Gas Delivery with Extended Range

Gas Delivery Front
Gas Delivery Front
Gas Delivery Back
Gas Delivery Back

  • Contains both a high flow and a low flow mass flow controller which allows for a turndown ratio of up to 1000 to 1 in a single module
  • Flow rates up to 2500 SLPM per gas
  • All-digital control eliminates analog calibration requirements and inaccuracies
  • Ethernet Interface for simple configuration and expansion!
  • The output from multiple Gas Delivery Modules may be combined to provide dynamically controlled gas flow rates and compositions, including Stoichiometric control
  • System-wide control of all Fideris Test System Components using FCPower Software, Labview, or other programming language
  • Integrated hardwired Run/Standby signal 
  • Power Over Ethernet (PoE) for redundant power 
  • Front panel LED status of Ethernet communications, inlet gas pressure, gas enabled, and power
  • Pressure regulator on inlet gas line to provide the highest degree of accuracy, and check valve for gas backflow prevention


Specifications of the Gas Delivery Module with Extended Range
Dual mass flow control (high flow/low flow) of a single gas
Solenoid or pneumatically operated bubble tight valve
125 PSI (8.62 Bar)
All digitally controlled brands available including Alicat, Bronkhorst, Brooks, MKS, or Sierra
Electrical Requirements
Ethernet (DHCP)
Front Panel Controls and Displays
LCD with backlight, flow setpoint, and actual flow
Tx, Rx, Ident LEDs
LED illuminates above threshold pressure for main gas and purge gas
Enabled LED
1 1/2" (optional)
Back Panel Connections
Molex 39660-1