Gas Delivery with Fixed Purge Rate

Gas Delivery Front

Gas Delivery Back

Provides mass flow control of one gas and a fail-safe purge system with orifice controlled purge rate

Flow rates up to 2500 SLPM per gas

All-digital control eliminates analog calibration requirements and inaccuracies

Ethernet Interface for simple configuration and expansion!

The output from multiple Gas Delivery Modules may be combined to provide dynamically controlled gas flow rates and compositions, including Stoichiometric control

System-wide control of all Fideris® Test System Components using FCPower Software, Labview, or other programming language

Integrated hardwired Run/Standby signal

Power Over Ethernet (PoE) for redundant power

Front panel LED status of Ethernet communications, inlet gas pressure, gas enabled, and power

Pressure regulator on inlet gas line to provide the highest degree of accuracy, and check valves for gas backflow prevention

Specifications

Specifications of the Gas Delivery Module with Fixed Purge Rate

Gas Control:

Mass flow control of one gas plus fail-safe operation of a purge gas

Gas Inlet Valves:

Solenoid or pneumatically operated bubble tight valve

Maximum Inlet Gas Pressure:

125 PSI (8.62 Bar)

Mass Flow Controller Brands:

All digitally controlled brands available including Alicat, Bronkhorst, Brooks, MKS, or Sierra

Purge Valve:

Fail-safe, normally open, solenoid valve or pneumatically operated valve

Purge:

Orifice controlled fixed purge rate

Electrical Requirements

Control Voltage:

26-50VDC

Communication:

Ethernet (DHCP)

Front Panel Controls and Displays

Purge Operation Mode Switch:

On, Disable, Auto

Unit Status:

LCD with backlight, flow setpoint, and actual flow

Communications:

Tx, Rx, Ident LEDs

Inlet Pressure Status:

LED illuminates above threshold pressure for main gas and purge gas

Enabled / Standby Status:

Enabled LED

Supply Pressure Gauge:

1 1/2" (optional)

Back Panel Connections

Power / Run/Standby:

Molex 39660-1004

Communications:

RJ45 (8P8C) Ethernet

Supply Connection:

Swagelok bulkhead union or optional quick-connect. 1/4" on 1U modules, 1/4" or 3/8" on 2U modules, 1/2" or 3/4" on 3U modules. VCR on optional UHP (Ultra-High Purity) models

Outlet Connection:

Swagelok bulkhead union or optional quick-connect. 1/4" on 1U modules, 1/4" or 3/8" on 2U modules, 1/2" or 3/4" on 3U modules. VCR on optional UHP models

Purge Connection:

1/4" Swagelok bulkhead union or quick connect

Physical Characteristics

Dimensions:

1U Modules: 1.75", 2U Modules: 3.5", 3U Modules: 5.25" 19" rackmount; 21" deep

System Weight:

Dependent on configuration,approximately 15 lbs for 1U

Operating Enviro