GAS DELIVERY

Overview

Mass flow control of up to two independent gases per module

Flow rates up to 5000 SLPM

Multiple channels provide dynamic stochiometric mixing

Integrated safety: check valves, pressure regulators, purge lines, redundant software, or hardwired interlock controls

Fully automated and remote control with Fideris Test Suite™ software

Quick swappable modules for zero downtime during service or calibration

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Choose between the following configurations

Single-channel for one gas stream

Single-channel with a fail-safe, purge system (fixed or adjustable)

Dual-channel for two independent gases

Gas mixer for two independent gases

Gas divider to separate a gas stream into two outputs

Gas selector to choose between up to six independent gases

Controller Specifications

. . .

Flow Rate Range ¹
Mass Flow Accuracy ²
Repeatability ³
Steady State Control Range
Typical Response Time ⁴
Gas Temperature Range
Temperature Accuracy
Operating Pressure Range
Supply Gas Humidity Range
Sensor Response Time
0.004 sccm – 5000 SLPM
± 0.6% of reading or ± 0.1% of full-scale, whichever is greater
± 0.1% of reading + 0.02% of full-scale
0.01 - 100% of full-scale
30 ms
-10-60°C
± 0.75°C
11.5 - 175 psia
0 - 95%, non-condensing
< 1 ms

¹ Full-scale flow rate can be specified or calibrated at any level between 0.5 sccm - 5000 SLPM
² (0.8% of reading + 0.2% of full-scale) for 0.5-5 sccm and 26-5000 SLPM
³ (0.2% of reading + 0.02% of full-scale) for 0.5-5 sccm and 26-5000 SLPM
⁴ As fast as 100 ms for 0.5-5sccm (Depends on flow rate, user adjustable)

 

Back Panel Connections

Power/Run/Standby
Data Connections
Supply Connection (Swagelok or quick connect)

Outlet Connection (Swagelok or quick connect)

Purge Connection (Swagelok or quick connect)
Control Air Connection (Instant Tube Fitting)

. . .

4 Position MTA
Ethernet
1U: 1/4”
2U: 3/8”
1U: 1/8” or 1/4”
2U: 3/8”
1/4”
1/8”
 

Physical Characteristics

Dimensions

System Weight

Operating Conditions
Clearance for Operation

. . .

1U: 1.75” H x 19” W x 21” D
2U: 3.50” H x 19” W x 21” D
1U: 19 lbs
2U: 25 lbs
40-100°F; 0-85% RH non-condensing; indoor use only
Front: 6”, Back: 6", Sides: 0", Top: 0"